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MICROMACHINING TECHNIQUES FOR FABRICATION OF MICRO AND NANO STRUCTURES Edited by Mojtaba Kahrizi Micromachining Techniques for Fabrication of Micro and Nano Structures Edited by Mojtaba Kahrizi Published by InTech Janeza Trdine 9, 51000 Rijeka, Croatia Copyright © 2011 InTech All chapters are Open Access distributed under the Creative Commons Attribution 3.0 license, which allows users to download, copy and build upon published articles even for commercial purposes, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications. After this work has been published by InTech, authors have the right to republish it, in whole or part, in any publication of which they are the author, and to make other personal use of the work. Any republication, referencing or personal use of the work must explicitly identify the original source. As for readers, this license allows users to download, copy and build upon published chapters even for commercial purposes, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications. Notice Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published chapters. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials, instructions, methods or ideas contained in the book. Publishing Process Manager Oliver Kurelic Technical Editor Teodora Smiljanic Cover Designer InTech Design Team First published January, 2012 Printed in Croatia A free online edition of this book is available at www.intechopen.com Additional hard copies can be obtained from orders@intechweb.org Micromachining Techniques for Fabrication of Micro and Nano Structures, Edited by Mojtaba Kahrizi p. cm. ISBN 978-953-307-906-6 free online editions of InTech Books and Journals can be found at www.intechopen.com Contents Preface IX Chapter 1 Focused Ion Beam Based Three-Dimensional Nano-Machining 1 Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim Chapter 2 Miniature Engineered Tapered Fiber Tip Devices by Focused Ion Beam Micromachining 17 Fei Xu, Jun-long Kou, Yan-qing Lu and Wei Hu Chapter 3 Fundamentals of Laser Ablation of the Materials Used in Microfluiducs 35 Tai-Chang Chen and Robert Bruce Darling Chapter 4 Microwave Meta-Material Absorbers Utilizing Laser Micro-Machining Technology Hongmin Lee 61 Chapter 5 Laser Micromachining and Micro-Patterning with a Nanosecond UV Laser 85 Xianghua Wang, Giuseppe Yickhong Mak and Hoi Wai Choi Chapter 6 Laser Ablation for Polymer Waveguide Fabrication 109 Shefiu S. Zakariyah Chapter 7 Micro Eletro Discharge Milling for Microfabrication 131 Mohammad Yeakub Ali, Reyad Mehfuz, Ahsan Ali Khan and Ahmad Faris Ismail Chapter 8 Mechanical Micromachining by Drilling, Milling and Slotting 159 T. Gietzelt and L. Eichhorn Chapter 9 Release Optimization of Suspended Membranes in MEMS 183 Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal VI Contents Chapter 10 Micro Abrasive-Waterjet Technology 205 H.-T. Liu and E. Schubert Chapter 11 Electrochemical Spark Micromachining Process Anjali Vishwas Kulkarni 235 Chapter 12 Integrated MEMS: Opportunities & Challenges P.J. French and P.M. Sarro 253 Chapter 13 Modeling and Simulation of MEMS Components: Challenges and Possible Solutions 277 Idris Ahmed Ali Preface Making microsystems at a scale level of few microns is called micromachining. Micromachining is used to fabricate three-dimensional microstructures. It is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). MEMS usually consist of three major parts: sensors, actuators, and an associate electronic circuitry that acts as the brain and controller of the whole system. There are two types of micromachining. Bulk micromachining starts with a silicon wafer or other substrate, which is selectively etched using dry or wet etching techniques, laser ablation, or focused ion beams. The most common substrate in this technology is single crystal silicon. Variation in the strength of bonds along various planes in this periodic structure makes it susceptible to etching with various rates along different crystal orientations. The wet anisotropic etching of silicon in hydroxide solutions, like potassium hydroxide (KOH) or tetra methyl ammonium hydroxide (TMAH), is performed to etch silicon selectively along a specific orientation. Due to the high selective ratio, the etch rate varies along various orientations in this semiconductor, making it possible to design and fabricate many 3-D microstructures. This type of etching is inexpensive and is generally used in early, low-budget research. Although the wet etching is the most common practice in micromachining, dry etching techniques like laser ablation and focused ion beams, are also often used to produce microstructures. This technique is not only used to produce micro devices; it has now been extended to fabricate many devices at the level of nano scales. Another micromachining technique is surface micromachining, which involves fabrication of layers (usually using standard CMOS technology) on the surface of a substrate, followed by etching of the sacrificial layers. The purpose of this book is to introduce advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications from esteemed researchers and scientists. The book consists of 13 chapters. The first two chapters demonstrate fabrication of several micro and nano devices using Focused Ion Beams techniques. The next five chapters are related to the application of lasers and laser ablation techniques used in bulk micromachining. Several other specialized methods and technologies are presented in the subsequent chapters. Throughout the book, each chapter gives a complete description of a specific X Preface micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of MEMS and nanotechnology, this collection of articles can be used by scientists and researchers in the disciplines of engineering, material sciences, physics and chemistry Mojtaba Kahrizi, Professor ECE Department, Concordia University, Montreal, Quebec, Canada