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Micro Electro Mechanical System Design © 2005 by Taylor & Francis Group, LLC MECHANICAL ENGINEERING A Series of Textbooks and Reference Books Founding Editor L. L. Faulkner Columbus Division, Battelle Memorial Institute and Department of Mechanical Engineering The Ohio State University Columbus, Ohio 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. 15. 16. 17. 18. 19. 20. 21. 22. 23. 24. Spring Designer’s Handbook, Harold Carlson Computer-Aided Graphics and Design, Daniel L. Ryan Lubrication Fundamentals, J. George Wills Solar Engineering for Domestic Buildings, William A. Himmelman Applied Engineering Mechanics: Statics and Dynamics, G. Boothroyd and C. Poli Centrifugal Pump Clinic, Igor J. Karassik Computer-Aided Kinetics for Machine Design, Daniel L. Ryan Plastics Products Design Handbook, Part A: Materials and Components; Part B: Processes and Design for Processes, edited by Edward Miller Turbomachinery: Basic Theory and Applications, Earl Logan, Jr. Vibrations of Shells and Plates, Werner Soedel Flat and Corrugated Diaphragm Design Handbook, Mario Di Giovanni Practical Stress Analysis in Engineering Design, Alexander Blake An Introduction to the Design and Behavior of Bolted Joints, John H. Bickford Optimal Engineering Design: Principles and Applications, James N. Siddall Spring Manufacturing Handbook, Harold Carlson Industrial Noise Control: Fundamentals and Applications, edited by Lewis H. Bell Gears and Their Vibration: A Basic Approach to Understanding Gear Noise, J. Derek Smith Chains for Power Transmission and Material Handling: Design and Applications Handbook, American Chain Association Corrosion and Corrosion Protection Handbook, edited by Philip A. Schweitzer Gear Drive Systems: Design and Application, Peter Lynwander Controlling In-Plant Airborne Contaminants: Systems Design and Calculations, John D. Constance CAD/CAM Systems Planning and Implementation, Charles S. Knox Probabilistic Engineering Design: Principles and Applications, James N. Siddall Traction Drives: Selection and Application, Frederick W. Heilich III and Eugene E. Shube © 2005 by Taylor & Francis Group, LLC 25. 26. 27. 28. 29. 30. 31. 32. 33. 34. 35. 36. 37. 38. 39. 40. 41. 42. 43. 44. 45. 46. 47. 48. 49. 50. 51. 52. 53. 54. 55. 56. Finite Element Methods: An Introduction, Ronald L. Huston and Chris E. Passerello Mechanical Fastening of Plastics: An Engineering Handbook, Brayton Lincoln, Kenneth J. Gomes, and James F. Braden Lubrication in Practice: Second Edition, edited by W. S. Robertson Principles of Automated Drafting, Daniel L. Ryan Practical Seal Design, edited by Leonard J. Martini Engineering Documentation for CAD/CAM Applications, Charles S. Knox Design Dimensioning with Computer Graphics Applications, Jerome C. Lange Mechanism Analysis: Simplified Graphical and Analytical Techniques, Lyndon O. Barton CAD/CAM Systems: Justification, Implementation, Productivity Measurement, Edward J. Preston, George W. Crawford, and Mark E. Coticchia Steam Plant Calculations Manual, V. Ganapathy Design Assurance for Engineers and Managers, John A. Burgess Heat Transfer Fluids and Systems for Process and Energy Applications, Jasbir Singh Potential Flows: Computer Graphic Solutions, Robert H. Kirchhoff Computer-Aided Graphics and Design: Second Edition, Daniel L. Ryan Electronically Controlled Proportional Valves: Selection and Application, Michael J. Tonyan, edited by Tobi Goldoftas Pressure Gauge Handbook, AMETEK, U.S. Gauge Division, edited by Philip W. Harland Fabric Filtration for Combustion Sources: Fundamentals and Basic Technology, R. P. Donovan Design of Mechanical Joints, Alexander Blake CAD/CAM Dictionary, Edward J. Preston, George W. Crawford, and Mark E. Coticchia Machinery Adhesives for Locking, Retaining, and Sealing, Girard S. Haviland Couplings and Joints: Design, Selection, and Application, Jon R. Mancuso Shaft Alignment Handbook, John Piotrowski BASIC Programs for Steam Plant Engineers: Boilers, Combustion, Fluid Flow, and Heat Transfer, V. Ganapathy Solving Mechanical Design Problems with Computer Graphics, Jerome C. Lange Plastics Gearing: Selection and Application, Clifford E. Adams Clutches and Brakes: Design and Selection, William C. Orthwein Transducers in Mechanical and Electronic Design, Harry L. Trietley Metallurgical Applications of Shock-Wave and High-Strain-Rate Phenomena, edited by Lawrence E. Murr, Karl P. Staudhammer, and Marc A. Meyers Magnesium Products Design, Robert S. Busk How to Integrate CAD/CAM Systems: Management and Technology, William D. Engelke Cam Design and Manufacture: Second Edition; with cam design software for the IBM PC and compatibles, disk included, Preben W. Jensen Solid-State AC Motor Controls: Selection and Application, Sylvester Campbell © 2005 by Taylor & Francis Group, LLC 57. 58. 59. 60. 61. 62. 63. 64. 65. 66. 67. 68. 69. 70. 71. 72. 73. 74. 75. 76. 77. 78. 79. 80. 81. 82. 83. 84. 85. 86. 87. Fundamentals of Robotics, David D. Ardayfio Belt Selection and Application for Engineers, edited by Wallace D. Erickson Developing Three-Dimensional CAD Software with the IBM PC, C. Stan Wei Organizing Data for CIM Applications, Charles S. Knox, with contributions by Thomas C. Boos, Ross S. Culverhouse, and Paul F. Muchnicki Computer-Aided Simulation in Railway Dynamics, by Rao V. Dukkipati and Joseph R. Amyot Fiber-Reinforced Composites: Materials, Manufacturing, and Design, P. K. Mallick Photoelectric Sensors and Controls: Selection and Application, Scott M. Juds Finite Element Analysis with Personal Computers, Edward R. Champion, Jr. and J. Michael Ensminger Ultrasonics: Fundamentals, Technology, Applications: Second Edition, Revised and Expanded, Dale Ensminger Applied Finite Element Modeling: Practical Problem Solving for Engineers, Jeffrey M. Steele Measurement and Instrumentation in Engineering: Principles and Basic Laboratory Experiments, Francis S. Tse and Ivan E. Morse Centrifugal Pump Clinic: Second Edition, Revised and Expanded, Igor J. Karassik Practical Stress Analysis in Engineering Design: Second Edition, Revised and Expanded, Alexander Blake An Introduction to the Design and Behavior of Bolted Joints: Second Edition, Revised and Expanded, John H. Bickford High Vacuum Technology: A Practical Guide, Marsbed H. Hablanian Pressure Sensors: Selection and Application, Duane Tandeske Zinc Handbook: Properties, Processing, and Use in Design, Frank Porter Thermal Fatigue of Metals, Andrzej Weronski and Tadeusz Hejwowski Classical and Modern Mechanisms for Engineers and Inventors, Preben W. Jensen Handbook of Electronic Package Design, edited by Michael Pecht Shock-Wave and High-Strain-Rate Phenomena in Materials, edited by Marc A. Meyers, Lawrence E. Murr, and Karl P. Staudhammer Industrial Refrigeration: Principles, Design and Applications, P. C. Koelet Applied Combustion, Eugene L. Keating Engine Oils and Automotive Lubrication, edited by Wilfried J. Bartz Mechanism Analysis: Simplified and Graphical Techniques, Second Edition, Revised and Expanded, Lyndon O. Barton Fundamental Fluid Mechanics for the Practicing Engineer, James W. Murdock Fiber-Reinforced Composites: Materials, Manufacturing, and Design, Second Edition, Revised and Expanded, P. K. Mallick Numerical Methods for Engineering Applications, Edward R. Champion, Jr. Turbomachinery: Basic Theory and Applications, Second Edition, Revised and Expanded, Earl Logan, Jr. Vibrations of Shells and Plates: Second Edition, Revised and Expanded, Werner Soedel Steam Plant Calculations Manual: Second Edition, Revised and Expanded, V. Ganapathy © 2005 by Taylor & Francis Group, LLC 88. 89. 90. 91. 92. 93. 94. 95. 96. 97. 98. 99. 100. 101. 102. 103. 104. 105. 106. 107. 108. 109. 110. 111. 112. 113. 114. 115. 116. 117. 118. 119. Industrial Noise Control: Fundamentals and Applications, Second Edition, Revised and Expanded, Lewis H. Bell and Douglas H. Bell Finite Elements: Their Design and Performance, Richard H. MacNeal Mechanical Properties of Polymers and Composites: Second Edition, Revised and Expanded, Lawrence E. Nielsen and Robert F. Landel Mechanical Wear Prediction and Prevention, Raymond G. Bayer Mechanical Power Transmission Components, edited by David W. South and Jon R. Mancuso Handbook of Turbomachinery, edited by Earl Logan, Jr. Engineering Documentation Control Practices and Procedures, Ray E. Monahan Refractory Linings Thermomechanical Design and Applications, Charles A. Schacht Geometric Dimensioning and Tolerancing: Applications and Techniques for Use in Design, Manufacturing, and Inspection, James D. Meadows An Introduction to the Design and Behavior of Bolted Joints: Third Edition, Revised and Expanded, John H. Bickford Shaft Alignment Handbook: Second Edition, Revised and Expanded, John Piotrowski Computer-Aided Design of Polymer-Matrix Composite Structures, edited by Suong Van Hoa Friction Science and Technology, Peter J. Blau Introduction to Plastics and Composites: Mechanical Properties and Engineering Applications, Edward Miller Practical Fracture Mechanics in Design, Alexander Blake Pump Characteristics and Applications, Michael W. Volk Optical Principles and Technology for Engineers, James E. Stewart Optimizing the Shape of Mechanical Elements and Structures, A. A. Seireg and Jorge Rodriguez Kinematics and Dynamics of Machinery, Vladimír Stejskal and Michael Valásek Shaft Seals for Dynamic Applications, Les Horve Reliability-Based Mechanical Design, edited by Thomas A. Cruse Mechanical Fastening, Joining, and Assembly, James A. Speck Turbomachinery Fluid Dynamics and Heat Transfer, edited by Chunill Hah High-Vacuum Technology: A Practical Guide, Second Edition, Revised and Expanded, Marsbed H. Hablanian Geometric Dimensioning and Tolerancing: Workbook and Answerbook, James D. Meadows Handbook of Materials Selection for Engineering Applications, edited by G. T. Murray Handbook of Thermoplastic Piping System Design, Thomas Sixsmith and Reinhard Hanselka Practical Guide to Finite Elements: A Solid Mechanics Approach, Steven M. Lepi Applied Computational Fluid Dynamics, edited by Vijay K. Garg Fluid Sealing Technology, Heinz K. Muller and Bernard S. Nau Friction and Lubrication in Mechanical Design, A. A. Seireg Influence Functions and Matrices, Yuri A. Melnikov © 2005 by Taylor & Francis Group, LLC 120. 121. 122. 123. 124. 125. 126. 127. 128. 129. 130. 131. 132. 133. 134. 135. 136. 137. 138. 139. 140. 141. 142. 143. 144. 145. 146. 147. 148. 149. 150. Mechanical Analysis of Electronic Packaging Systems, Stephen A. McKeown Couplings and Joints: Design, Selection, and Application, Second Edition, Revised and Expanded, Jon R. Mancuso Thermodynamics: Processes and Applications, Earl Logan, Jr. Gear Noise and Vibration, J. Derek Smith Practical Fluid Mechanics for Engineering Applications, John J. Bloomer Handbook of Hydraulic Fluid Technology, edited by George E. Totten Heat Exchanger Design Handbook, T. Kuppan Designing for Product Sound Quality, Richard H. Lyon Probability Applications in Mechanical Design, Franklin E. Fisher and Joy R. Fisher Nickel Alloys, edited by Ulrich Heubner Rotating Machinery Vibration: Problem Analysis and Troubleshooting, Maurice L. Adams, Jr. Formulas for Dynamic Analysis, Ronald L. Huston and C. Q. Liu Handbook of Machinery Dynamics, Lynn L. Faulkner and Earl Logan, Jr. Rapid Prototyping Technology: Selection and Application, Kenneth G. Cooper Reciprocating Machinery Dynamics: Design and Analysis, Abdulla S. Rangwala Maintenance Excellence: Optimizing Equipment Life-Cycle Decisions, edited by John D. Campbell and Andrew K. S. Jardine Practical Guide to Industrial Boiler Systems, Ralph L. Vandagriff Lubrication Fundamentals: Second Edition, Revised and Expanded, D. M. Pirro and A. A. Wessol Mechanical Life Cycle Handbook: Good Environmental Design and Manufacturing, edited by Mahendra S. Hundal Micromachining of Engineering Materials, edited by Joseph McGeough Control Strategies for Dynamic Systems: Design and Implementation, John H. Lumkes, Jr. Practical Guide to Pressure Vessel Manufacturing, Sunil Pullarcot Nondestructive Evaluation: Theory, Techniques, and Applications, edited by Peter J. Shull Diesel Engine Engineering: Thermodynamics, Dynamics, Design, and Control, Andrei Makartchouk Handbook of Machine Tool Analysis, Ioan D. Marinescu, Constantin Ispas, and Dan Boboc Implementing Concurrent Engineering in Small Companies, Susan Carlson Skalak Practical Guide to the Packaging of Electronics: Thermal and Mechanical Design and Analysis, Ali Jamnia Bearing Design in Machinery: Engineering Tribology and Lubrication, Avraham Harnoy Mechanical Reliability Improvement: Probability and Statistics for Experimental Testing, R. E. Little Industrial Boilers and Heat Recovery Steam Generators: Design, Applications, and Calculations, V. Ganapathy The CAD Guidebook: A Basic Manual for Understanding and Improving Computer-Aided Design, Stephen J. Schoonmaker © 2005 by Taylor & Francis Group, LLC 151. 152. 153. 154. 155. 156. 157. 158. 159. 160. 161. 162. 163. 164. 165. 166. 167. 168. 169. 170. 171. 172. 173. 174. 175. 176. 177. 178. 179. 180. 181. Industrial Noise Control and Acoustics, Randall F. Barron Mechanical Properties of Engineered Materials, Wolé Soboyejo Reliability Verification, Testing, and Analysis in Engineering Design, Gary S. Wasserman Fundamental Mechanics of Fluids: Third Edition, I. G. Currie Intermediate Heat Transfer, Kau-Fui Vincent Wong HVAC Water Chillers and Cooling Towers: Fundamentals, Application, and Operation, Herbert W. Stanford III Gear Noise and Vibration: Second Edition, Revised and Expanded, J. Derek Smith Handbook of Turbomachinery: Second Edition, Revised and Expanded, edited by Earl Logan, Jr. and Ramendra Roy Piping and Pipeline Engineering: Design, Construction, Maintenance, Integrity, and Repair, George A. Antaki Turbomachinery: Design and Theory, Rama S. R. Gorla and Aijaz Ahmed Khan Target Costing: Market-Driven Product Design, M. Bradford Clifton, Henry M. B. Bird, Robert E. Albano, and Wesley P. Townsend Fluidized Bed Combustion, Simeon N. Oka Theory of Dimensioning: An Introduction to Parameterizing Geometric Models, Vijay Srinivasan Handbook of Mechanical Alloy Design, edited by George E. Totten, Lin Xie, and Kiyoshi Funatani Structural Analysis of Polymeric Composite Materials, Mark E. Tuttle Modeling and Simulation for Material Selection and Mechanical Design, edited by George E. Totten, Lin Xie, and Kiyoshi Funatani Handbook of Pneumatic Conveying Engineering, David Mills, Mark G. Jones, and Vijay K. Agarwal Clutches and Brakes: Design and Selection, Second Edition, William C. Orthwein Fundamentals of Fluid Film Lubrication: Second Edition, Bernard J. Hamrock, Steven R. Schmid, and Bo O. Jacobson Handbook of Lead-Free Solder Technology for Microelectronic Assemblies, edited by Karl J. Puttlitz and Kathleen A. Stalter Vehicle Stability, Dean Karnopp Mechanical Wear Fundamentals and Testing: Second Edition, Revised and Expanded, Raymond G. Bayer Liquid Pipeline Hydraulics, E. Shashi Menon Solid Fuels Combustion and Gasification, Marcio L. de Souza-Santos Mechanical Tolerance Stackup and Analysis, Bryan R. Fischer Engineering Design for Wear, Raymond G. Bayer Vibrations of Shells and Plates: Third Edition, Revised and Expanded, Werner Soedel Refractories Handbook, edited by Charles A. Schacht Practical Engineering Failure Analysis, Hani M. Tawancy, Anwar Ul-Hamid, and Nureddin M. Abbas Mechanical Alloying and Milling, C. Suryanarayana Mechanical Vibration: Analysis, Uncertainties, and Control, Second Edition, Revised and Expanded, Haym Benaroya © 2005 by Taylor & Francis Group, LLC 182. 183. 184. 185. 186. 187. 188. 189. 190. 191. 192. 193. 194. Design of Automatic Machinery, Stephen J. Derby Practical Fracture Mechanics in Design: Second Edition, Revised and Expanded, Arun Shukla Practical Guide to Designed Experiments, Paul D. Funkenbusch Gigacycle Fatigue in Mechanical Practive, Claude Bathias and Paul C. Paris Selection of Engineering Materials and Adhesives, Lawrence W. Fisher Boundary Methods: Elements, Contours, and Nodes, Subrata Mukherjee and Yu Xie Mukherjee Rotordynamics, Agnieszka (Agnes) Muszńyska Pump Characteristics and Applications: Second Edition, Michael W. Volk Reliability Engineering: Probability Models and Maintenance Methods, Joel A. Nachlas Industrial Heating: Principles, Techniques, Materials, Applications, and Design, Yeshvant V. Deshmukh Micro Electro Mechanical System Design, James J. Allen Probability Models in Engineering and Science, Haym Benaroya and Seon Han Damage Mechanics, George Z. Voyiadjis and Peter I. Kattan © 2005 by Taylor & Francis Group, LLC Micro Electro Mechanical System Design James J. Allen Boca Raton London New York Singapore A CRC title, part of the Taylor & Francis imprint, a member of the Taylor & Francis Group, the academic division of T&F Informa plc. © 2005 by Taylor & Francis Group, LLC Published in 2005 by CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742 © 2005 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group No claim to original U.S. Government works Printed in the United States of America on acid-free paper 10 9 8 7 6 5 4 3 2 1 International Standard Book Number-10: 0-8247-5824-2 (Hardcover) International Standard Book Number-13: 978-0-8247-5824-0 (Hardcover) Library of Congress Card Number 2005041771 This book contains information obtained from authentic and highly regarded sources. Reprinted material is quoted with permission, and sources are indicated. A wide variety of references are listed. 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Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe. Library of Congress Cataloging-in-Publication Data Allen, James J. Micro electro mechanical system design / James J. Allen. p. cm. -- (Mechanical engineering ; 192) Includes bibliographical references and index. ISBN 0-8247-5824-2 (alk. paper) 1. Microelectromechanical systems--Design and construction. 2. Engineering design. I. Title. II. Mechanical engineering (Taylor & Francis) ; 192. TK153.A47 2005 621--dc22 2005041771 Visit the Taylor & Francis Web site at http://www.taylorandfrancis.com Taylor & Francis Group is the Academic Division of T&F Informa plc. © 2005 by Taylor & Francis Group, LLC and the CRC Press Web site at http://www.crcpress.com